方形阵列微孔光学元件

MPO是一种可对X射线和紫外等波段光子进行聚焦的掠入射型聚焦光学元件。其是由上百万个微米级尺寸方形微孔组成的玻璃薄片,微孔内壁表面粗糙度在纳米级以下。MPO可分为平面和球面两类,其中球面MPO可对平行光进行会聚,平面MPO可对发散光进行会聚。MPO具有大视场、高分辨率、小体积等特点。为了得到更好的聚焦效果,可在微孔内壁表面镀制反射膜,且针对不同应用波段可选择不同膜层材料。

MPO is a grazing-incidence focusing optical device that can focus photons in wavelengths such as X-ray and ultraviolet. It is a glass sheet with a porous structure, consisting of millions of square micropores with micrometer size, and the inner wall surface of micropore has extremely low roughness less than 1 nm. MPO shapes can be divided into two types: plane MPO and spherical MPO. Among them, spherical MPO can focus parallel light, and plane MPO can focus divergent light. MPO is the good one at ensuring both a large field of view and high resolution in the condition of the smaller volume. In order to obtain the better focusing performance, a reflecting film can also be coated on the inner wall of the micro pore, and different film materials can be selected for different application bands.

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